Scanning Electron Microscope (SEM) with EDS microanalysis

Technique

A scanning electron microscope (SEM) connected to an energy dispersion system (EDS) for microanalysis is a tool which enables non-destructive investigation to provide precise morphological and chemical data. Chemical analysis (microanalysis) on the sample is performed using an energy dispersion system (EDS).

Applications

  • Morphological observations of samples for various purposes
  • Precise (qualitative or semi-quantitative) microanalysis of materials
  • Surface defects and contamination
  • Compositional maps