Scanning Electron Microscope (SEM) with EDS microanalysis


A scanning electron microscope (SEM) connected to an energy dispersion system (EDS) for microanalysis is a tool which enables non-destructive investigation to provide precise morphological and chemical data. Chemical analysis (microanalysis) on the sample is performed using an energy dispersion system (EDS).


  • Morphological observations of samples for various purposes
  • Precise (qualitative or semi-quantitative) microanalysis of materials
  • Surface defects and contamination
  • Compositional maps
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